Z Elevator
The Danaher Motion Z-Elevator Stages provide a very compact, accurate means of achieving vertical motion. Precision, non-recircu-lating ways in each of the four corners keep pitch and yaw below 15 arc-seconds over full travel. This way configuration provides very straight, smooth, and repeatable motion which is needed to satisfy demanding wafer inspection, scanning, and probing applications.
Features
- Low profile with no cantilevering
- 0.5 inch and 1 inch travel versions
- Excellent straightness and repeatability
- Anti-backlash friction nut