BAZ UltraStiff
The BAZ, Ultra-Stiff Z-Elevator Stage provides very stiff vertical motion with low angular errors and high resolution. Its unique design maintains a torsional stiffness of 4 x 10 5 N-m/rad and a lateral stiffness of 1 x 10 7 N/m, making it ideal for wafer positioning applications. Precision, crossed roller ways support user loads up to 50 kg and keep angular runouts to 5 arc-seconds or less over the full 5mm travel.
Features
- Ideal for use in applications which require low vibration during X-Y scans
- High natural frequency
- High load capacity