XY Low Profile
XYMR™ Microscope Stage: The Microscope Stage brings automated, highly accurate X-Y positioning to a wide range of microscope-based applications including wafer, mask, and die inspection; cell counting and analysis; video profilometry; etc.
X-Theta™ Stage:The Low Profile X-Theta Stage provides two axes of motion in a stage body height of only 1.2 inches, making it ideal for various inspection applications, including wafer, CD, and hard drive media.
The Microscope Stage brings automated, highly accurate X-Y positioning to a wide range of microscope-based applications including wafer, mask, and die inspection; cell counting and analysis; video profilometry; etc.
- Super-thin cross section
- 3" diameter clear aperture for transmissive applications (solid top also available)
- Precision crossed-roller ways
- 6" x 6" travel
- High repeatability friction nuts
The Low Profile X-Theta Stage provides two axes of motion in a stage body height of only 1.2 inches, making it ideal for various inspection applications, including wafer, CD, and hard drive media.
- Very thin cross section – only 1.2" high
- Precision crossedroller ways on linear axis
- High speed beltdriven theta axis