MAB-100 Linear Motor Stage

The all-new MAB-100 linear motor stage uses an air bearing guideway that delivers extremely precise straight-line motion with a total absence of friction.  Motion artifacts due to recirculating bearings or anti-creep mechanisms are wholly eliminated by the non-contact, air bearing design.  This small, compact design is suitable for use in a wide range of applications in the Life Sciences, Data Storage, Semiconductor, and other market segments.

The MAB-100 is driven by a non-contact, brushless servo motor with a unique moving magnet design that eliminates moving motor cables.  The overall travel is 100 mm; pitch and yaw are held to less than  +/- 7 uradians (+/-1.5 arc-second); and flatness and straightness are held to under +/- 200 nanometers.  Position feedback is provided by a linear optical encoder with a resolution of up to 5 nanometers.  The encoder includes an index signal enabling precise position registration upon power-up. The read head is mounted on a stationary base, eliminating any need for moving cables.  A pair of built-in, adjustable limit switches provide end of travel sensing, and rubber stops provide additional protection.

With a totally non-contact complement of air bearing guideway, linear motor, encoder, and limit switches, the MAB-100 stage is incapable of generating particles, and will meet (with appropriate input air filtration) Class 1 cleanroom standards.

The MAB-100 is also available with an embedded, high performance drive and control.  Adding a mere  58mm to the overall length, this version (MAB-100/HRC) provides a completely integrated “Smart Stage”, requiring only an external +24 VDC power supply and an RS-232 serial link for communication.  The MAB-100/HRC can function either as an intelligent slave to a host computer over the serial interface, or it can be preprogrammed to auto-run sophisticated motion sequences as a stand-alone device.  The MAB-100/HRC model features a 4096X encoder interpolation, providing a resolution of 5 nanometers.

MAB-100 Linear Motor Stage Specifications  

Specification  
Travel (mm) 100
Accuracy (microns) 11
Resolution Options (microns) 0.0052, 0.1, 0.5, 1, 5
Bi-directional Repeatability (microns) <0.032
Load Capacity (kg) 2.5
Moving Mass (kg) 1.05
Total Mass (kg) 2.7
Pitch and Yaw (arc-seconds) +/- 1.5
Straightness and Flatness (microns) Air Supply Pressure    Air Consumption                                +/- 0.2        1 bar (15psi)    5300sccm@ 1 bar      

1With two point slope correction.
2With High resolution control option.

Features

  • Reduced cost of ownership
  • Reduced machine down time
  • Air bearing guide reduces wear
  • No requirement for periodic lubrication
  • Operates on very low air pressure and low amplifier bus voltages